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國立交通大學 2014-12-12T01:34:21Z 以感應耦合式電漿系統成長之超薄氮氧化矽薄膜的電特性與可靠度研究 陳柏寧; Bo-Ning Chen; 張國明; 桂正楣; Kow-Ming Chang; Cheng-May Kwei

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