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Showing items 36-45 of 91  (10 Page(s) Totally)
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Institution Date Title Author
臺大學術典藏 2018-09-10T15:23:14Z Layout decomposition for Spacer-is-Metal (SIM) self-aligned double patterning Fang, S.-Y.;Tai, Y.-S.;Chang, Y.-W.; Fang, S.-Y.; Tai, Y.-S.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T14:57:59Z Overlay-Aware detailed routing for self-Aligned double patterning lithography using the cut process Liu, I.-J.;Fang, S.-Y.;Chang, Y.-W.; Liu, I.-J.; Fang, S.-Y.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T14:57:59Z A novel layout decomposition algorithm for triple patterning lithography Fang, S.-Y.;Chang, Y.-W.;Chen, W.-Y.; Fang, S.-Y.; Chang, Y.-W.; Chen, W.-Y.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:48:07Z Stitch-aware routing for multiple e-beam lithography Fang, S.-Y.;Liu, I.-J.;Chang, Y.-W.; Fang, S.-Y.; Liu, I.-J.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:48:07Z Simultaneous OPC- and CMP-aware routing based on accurate closed-form modeling Fang, S.-Y.;Lin, C.-W.;Liao, G.-W.;Chang, Y.-W.; Fang, S.-Y.; Lin, C.-W.; Liao, G.-W.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:48:07Z Graph-based subfield scheduling for electron-beam photomask fabrication Fang, S.-Y.;Chen, W.-Y.;Chang, Y.-W.; Fang, S.-Y.; Chen, W.-Y.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:22:26Z Native-conflict and stitch-aware wire perturbation for double patterning technology Fang, S.-Y.; Chen, S.-Y.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:22:26Z Graph-based subfield scheduling for electron-beam photomask fabrication Fang, S.-Y.; Chen, W.-Y.; Chang, Y.-W.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:22:26Z A novel layout decomposition algorithm for triple patterning lithography Fang, S.-Y.; Chang, Y.-W.; Chen, W.-Y.; YAO-WEN CHANG
臺大學術典藏 2018-09-10T09:22:25Z Simultaneous flare level and flare variation minimization with dummification in EUVL Fang, S.-Y.; Chang, Y.-W.; YAO-WEN CHANG

Showing items 36-45 of 91  (10 Page(s) Totally)
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