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| 國立交通大學 |
2014-12-08T15:42:17Z |
Novel I-line phase shift mask technique for submicron T-shaped gate formation
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Chen, SH; Chang, HC; Fu, DK; Chang, EY; Lai, YL; Cahng, L |
| 國立交通大學 |
2014-12-08T15:26:54Z |
A novel I-line phase shift mask (PSM) technique for submicron T-Gate formation
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Fu, DK; Chang, HC; Fang, CY; Lee, CS; Chang, EY |
| 國立交通大學 |
2014-12-08T15:26:28Z |
An etch back technique to achieve sub-micron T-gate for GaAsFETs using I-line stepper and phase shift mask (PSM)
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Fu, DK; Chen, SH; Chang, HC; Chang, EY |
Showing items 1-3 of 3 (1 Page(s) Totally)
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