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Institution Date Title Author
國立交通大學 2019-04-03T06:40:46Z Effect of bis-(3-sodiumsulfopropyl disulfide) byproducts on copper defects after chemical mechanical polishing Hung, Chi-Cheng; Lee, Wen-Hsi; Hu, Shao-Yu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立交通大學 2019-04-02T06:04:50Z A Study on the Plating and Wetting Ability of Ruthenium-Tungsten Multi-layers for Advanced Cu Metallization Kuo, Tai-Chen; Su, Yin-Hsien; Lee, Wen-Hsi; Liao, Wei-Hsiang; Wang, Yu-Sheng; Hung, Chi-Cheng; Wang, Ying-Lang
國立交通大學 2018-08-21T05:54:18Z Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaning Wei, Kuo-Hsiu; Hung, Chi-Cheng; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang
國立交通大學 2018-08-21T05:52:53Z Effect of tungsten incorporation in cobalt tungsten alloys as seedless diffusion barrier materials Su, Yin-Hsien; Kuo, Tai-Chen; Lee, Wen-Hsi; Wang, Yu-Sheng; Hung, Chi-Cheng; Tseng, Wei-Hsiang; Wei, Kuo-Hsiu; Wang, Ying-Lang
國立交通大學 2017-04-21T06:49:59Z A study on the plating and wetting ability of ruthenium-tungsten multi-layers for advanced Cu metallization Kuo, Tai-Chen; Su, Yin-Hsien; Lee, Wen-Hsi; Liao, Wei-Hsiang; Wang, Yu-Sheng; Hung, Chi-Cheng; Wang, Ying-Lang
國立交通大學 2017-04-21T06:48:55Z Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaning Wei, Kuo-Hsiu; Hung, Chi-Cheng; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2016-11-01 Cleaning methodology of small residue defect with surfactant in copper chemical mechanical polishing post-cleaning Wei, Kuo-Hsiu; Hung, Chi-Cheng; Wang, Yu-Sheng; Liu, Chuan-Pu; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2016-08-16 A study on the plating and wetting ability of ruthenium-tungsten multi-layers for advanced Cu metallization Kuo, Tai-Chen; Su, Yin-Hsien; Lee, Wen-Hsi; Liao, Wei-Hsiang; Wang, Yu-Sheng; Hung, Chi-Cheng; Wang, Ying-Lang
國立交通大學 2014-12-08T15:11:02Z Effect of Under-Layer Treatment of Ta/TaN Barrier Film on Corrosion Between Cu Seed and Ta in Chemical-Mechanical-Polishing Slurry Lee, Wen-Hsi; Hung, Chi-Cheng; Wang, Yu-Sheng; Chang, Shih-Chieh; Wang, Ying-Lang
國立成功大學 2010-07 Effect of Under-Layer Treatment of Ta/TaN Barrier Film on Corrosion Between Cu Seed and Ta in Chemical-Mechanical-Polishing Slurry Lee, Wen-Hsi; Hung, Chi-Cheng; Wang, Yu-Sheng; Chang, Shih-Chieh; Wang, Ying-Lang
國立成功大學 2010 Bis-(3-sodiumsulfopropyl disulfide) Decomposition with Cathodic Current Flowing in a Copper-Electroplating Bath Lee, Wen-Hsi; Hung, Chi-Cheng; Chang, Shih-Chieh; Wang, Ying-Lang
國立臺灣大學 2010 微波及毫米波功率放大器與倍頻器之研究 洪其正; Hung, Chi-Cheng
國立成功大學 2009-07 Magnetic Effect during Copper Electroplating Using Electrochemical Impedance Spectroscopy Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Hwang, Gwo-Jen; Wang, Ying-Lang
國立成功大學 2009-01-08 鑲嵌金屬導體連線銅電鍍添加劑機制及化學機械研磨後腐蝕之電化學阻抗特性研究 洪奇成; Hung, Chi-Cheng
國立成功大學 2008-12-01 Investigation of deplating behavior of Pt contact pins in semiconductor Cu electroplating process Hu, Shao-Yu; Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Chan, Din-Yuen; Wang, Ying-Lang
國立成功大學 2008-09 Investigation of the suppression effect of polyethylene glycol on copper electroplating by electrochemical impedance spectroscopy Hung, Chi-Cheng; Lee, Wen-Hsi; Wang, Ying-Lang; Chan, Din-Yuen; Hwang, Gwo-Jen
國立成功大學 2008-09 Investigation of copper scratches and void defects after chemical mechanical polishing Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Wang, Ying-Lang; Hwang, Gwo-Jen
國立成功大學 2008-06-30 Under-layer behavior study of low resistance Ta/TaNx barrier film Wang, Yu-Sheng; Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Wang, Ying-Lang
國立成功大學 2008-02 The electrical property of plasma-treated Ta/TaNx diffusion barrier Wang, Yu-Sheng; Lee, Wen-Hsi; Wang, Ying-Lang; Hung, Chi-Cheng; Chang, Shih-Chieh
國立成功大學 2008-02 Measurement techniques of sheet resistance on copper defects after chemical mechanical polishing Hung, Chi-Cheng; Lee, Wen-Hsi; Wang, Yu-Sheng; Chen, Yi-Ren
國立成功大學 2008-01 Effect of bis-(3-sodiumsulfopropyl disulfide) byproducts on copper defects after chemical mechanical polishing Hung, Chi-Cheng; Lee, Wen-Hsi; Hu, Shao-Yu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2008 Suppression effect of low-concentration bis-(3-sodiumsulfopropyl disulfide) on copper electroplating Hung, Chi-Cheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2008 Investigation of bis-(3-sodiumsulfopropyl disulfide) (SPS) decomposition in a copper-electroplating bath using mass spectroscopy Hung, Chi-Cheng; Lee, Wen-Hsi; Hu, Shao-Yu; Chang, Shih-Chieh; Chen, Kei-Wei; Wang, Ying-Lang
國立成功大學 2008 Investigation of static corrosion between W metals and TiNx barriers in a W chemical-mechanical-polishing slurry Hung, Chi-Cheng; Wang, Ying-Lang; Lee, Wen-Hsi; Chang, Shih-Chieh
國立成功大學 2008 Competitive adsorption between bis(3-sodiumsulfopropyl disulfide) and polyalkylene glycols on copper electroplating Hung, Chi-Cheng; Wang, Ying-Lang; Lee, Wen-Hsi; Chang, Shih-Chieh
國立成功大學 2008 Investigation of slurry chemical corrosion on TaN barriers with plasma treatment Hung, Chi-Cheng; Lee, Wen-Hsi; Wang, Ying-Lang
國立成功大學 2007-05 Role of surface tension in copper electroplating Chang, Shih-Chieh; Wang, Ying-Lang; Hung, Chi-Cheng; Lee, Wen-His; Hwang, Gwo-Jen
國立成功大學 2007 Investigation of galvanic corrosion between TaNx barriers and copper seed by electrochemical impedance spectroscopy Hung, Chi-Cheng; Lee, Wen-Hsi; Wang, Yu-Sheng; Chang, Shih-Chieh; Wang, Ying-Lang
國立成功大學 2007 Galvanic corrosion between TaNx barriers and copper seed Hung, Chi-Cheng; Wang, Yu-Sheng; Lee, Wen-Hsi; Chang, Shih-Chieh; Wang, Ying-Lang
國立臺灣大學 2007 我國橋樑工程職業災害預防管理對策 洪吉誠; Hung, Chi-Cheng

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