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Showing items 1-3 of 3 (1 Page(s) Totally) 1 View [10|25|50] records per page
| 國立交通大學 |
2014-12-08T15:19:21Z |
Direct quantitative analysis of phthalate esters as micro-contaminants in cleanroom air and wafer surfaces by auto-thermal desorption-gas chromatography-mass spectrometry
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Kang, YH; Den, W; Bai, HL; Ko, FH |
| 國立交通大學 |
2014-12-08T15:17:51Z |
Organic airborne molecular contamination in semiconductor fabrication clean rooms - A review
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Den, W; Bai, HL; Kang, YH |
| 國立交通大學 |
2014-12-08T15:17:22Z |
Short time deposition kinetics of diethyl phthalate and dibutyl phthalate on a silicon wafer surface
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Kang, YH; Den, W; Bai, HL |
Showing items 1-3 of 3 (1 Page(s) Totally) 1 View [10|25|50] records per page
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