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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)
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Institution Date Title Author
臺北醫學大學 2005 Comparative study of polycrystalline Ti, amorphous Ti, and multiamoIrphous Ti as a barrier film for Cu interconnect 歐耿良; Ou,Keng-Liang; Yu,Ming-Sun; Hsu,Ray-Quen; Lin,Ming-Hong.
臺北醫學大學 2005 Effect of pulse-reverse current on microstructure and properties of electroformed nickel-iron mold insert 歐耿良; 李勝揚; Yeh,Yih-Min; Chen,Chin-Sung; Tsai,Ming-Hung; Shyng,Yih-Chuen; Lee,Sheng-Yang; Ou,Keng-Liang
臺北醫學大學 2005 Interfacial reactions and electrical properties of hafnium-based thin films in Cu/barrier/n+-p junction diodes 歐耿良; 黃豪銘; 李勝揚; 林哲堂; Ou,Keng-Liang; Tsai,Ming-Hung; Huang,Haw-Ming; Chiou,Shi-Yung; Lin,Che-Tong; Lee,Sheng-Yang
臺北醫學大學 2005 Novel Multilayered Ti/TiN Barrier for Al Metallization 歐耿良; Wu,Wen-Fa; Tsai,Kou-Chiang; Chao,Chuen-Guang; Chen,Jen-Chung; Ou,Keng-Liang
臺北醫學大學 2005 Reliability of Multistacked Tantalum-based Structure as the Barrier Film in Ultralarge Scale Integrated Metallization 歐耿良; Ou,Keng-Liang; Wu,Chi-Chang; Hsu,Chiung-Chi; Chen,Chin-Sung; Shyng,Yih-Chuen; Wu,Wen-Fa
臺北醫學大學 2004 High Cu Diffusion Resistance in Ultrathin Multi-quasi-amorphous CVD-Ti/TiNx Films Ou,Keng-Liang; Chiou,Shi-Yung; Lin,Ming-Hong
臺北醫學大學 2004 Nanostructured TaN(O)/TaN barrier film formed by oxygen plasma treatment for copper interconnect Ou,Keng-Liang; Lin,Ming-Hong; Chiou,Shi-Yung
臺北醫學大學 2003 Effects of nitrogen plasma treatment on tantalum diffusion barriers in copper metallization Wu,Wen-Fa; Ou,Keng-Liang; Chou,Chang-Pin; Wu,Chi-Chang
臺北醫學大學 2003 PECVD-Ti/TiNx barrier with multilayered amorphous structure and high thermal stability for copper metallization Wu,Wen-Fa; Ou,Keng-Liang; Chou,Chang-Pin; Hsua,Jwo-Lun
臺北醫學大學 2002 Improved TaN Barrier Layer Against Cu Diffusion by Formation of an Amorphous Layer Using Plasma Treatment Ou,Keng-Liang; Wu,Wen-Fa; Chou,Chang-Pin; Chiou,Shi-Yung; Wu,Chi-Chang
臺北醫學大學 2001 Barrier Capability of TaNx Films Deposited by Different Nitrogen Flow Rate Against Cu Diffusion in Cu/TaNx/n+-p Junction Diodes Yang,Wen-Luh; Wu,Wen-Fa; Liu,Don-Gey; Wu,Chi-Chang; Ou,Keng Liang

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