臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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Institution	Date	Title	Author
國立彰化師範大學	2011-06	SOI Process and Stability Measurements of SCS Scanning Micromirror	Chen, Tzung-Ming; Brunne, J. ; Wallrabe, U.
國立彰化師範大學	2010-08	Compliant Scanning Micromirror Actuated with a Displacement Amplification Mechanism	Chen, Tzung-Ming; Schneider, F. ; Wallrabe, U.
國立彰化師範大學	2010	12° Design Rule for Single Crystal Silicon Curved Beam Compliant Mechanisms with Large Deformation	Chen, T.; Krausse, S.; Korvink, J. G.; Wallrabe, U.

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