臺灣學術機構典藏系統 (Taiwan Academic Institutional Repository, TAIR)

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	2019臺灣學術機構典藏研討會
	機構典藏系統RC7版本已發佈

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Institution	Date	Title	Author
國立交通大學	2014-12-08T15:02:31Z	Reactive ion etching of GaN with BCl3/SF6 plasmas	Feng, MS; Guo, JD; Lu, YM; Chang, EY
國立交通大學	2019-04-02T05:58:30Z	Reactive ion etching of GaN with BCl3/SF6 plasmas	Feng, MS; Guo, JD; Lu, YM; Chang, EY
國立交通大學	2014-12-12T02:11:24Z	Reactive ion etching of InP and InGaP using CH□/H□mixtures	陳昶儒; Chen, Chang-Ru; 張國明; Zhang, Guo-Ming
中原大學	1999	Reactive Ion Etching of Ir Films with a TiN Mask in Ar/O2/BCl3 Helicon Wave Plasma	T.C.Wei;M.C.Chiang;F.M.Pan;T.P.Liu;B.T.Dai;H.C.Chien;
中原大學	1992	Reactive ion etching of polyimidesiloxanes in fluorine-containing discharges	S. Jeng;H.S. Kwok;J.A. Tyrell
國立成功大學	1999-07-15	Reactive ion etching of Si SiGe in CF4/Ar and Cl-2/BCl3/Ar discharges	Chang, Shoou-Jinn; Juang, Y. Z.; Nayak, D. K.; Shiraki, Y.
國立成功大學	2000-06	Reactive ion etching of ZnSe, ZnSSe, ZnCdSe and ZnMgSSe by H-2/Ar and CH4/H-2/Ar	Chen, W. R.; Chang, Shoou-Jinn; Su, Yan-Kuin; Lan, Wen-How; Lin, A. C. H.; Chang, H
國立成功大學	2007-03	Reactive ion etching technique for via-hole applications in thick GaAs wafers	Wang, Chih-Cheng; Lin, Yu-Lu; Lin, Shun-Kuan; Li, Chun-Sheng; Huang, Hou-Kuei; Wu, Chang-Luen; Chang, Chian-Sern; Wang, Yeong-Her
國立交通大學	2014-12-08T15:45:10Z	Reactive ion pretreatment technique to improve the ashing resistance of low dielectric constant high carbon content polymer	Chang, KM; Yang, JY; Chang, YH; Tsai, JY
國立成功大學	2019-03-15	Reactive magnetron sputter-deposited TiNxOy multilayered solar selective coatings	Li;Cho-Yen;Sari;Indah, Fitri Nur;Ting;Jyh-Ming

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